Key features:

• Travel range of 250 x 210 mm
• Resolution of 0.04 μm
• Repeatability of ± 0.2 μm
• Automatically loads and unloads wafers
• Compatible with the ProScanTM III system and Olympus AL120 wafer handling systems.
Prior Scientific motorised shuttle stage is designed to be used for wafer inspection, using the Olympus AL120 wafer handling systems. The stage greatly reduces operator error and fatigue, whilst increasing the rate at which wafers are inspected.
The HWL6AL12 automatically loads and unloads wafers. When operating, the shuttle system automatically moves to the correct load position and activates the loader switch, notifying the loader that the wafer chuck is ready to receive the wafer. After transfer to the shuttle, the shuttle is retracted, allowing inspection. The stage allows either manual inspection using a joystick, or a
pre-programmed pattern for wholly automated inspection.
The HWL6AL12 has a large travel range, coupled with superb repeatability and resolution and, used in conjunction with Prior’s ProScanTM III system, ensures accuracy, precision, minimal error and ultimately a far more effective wafer inspection process.