Prior

H101F/N

Key features:

  • 0.7 µm repeatability , with the ability to store points for later inspection and analysis.
  • <1 µm resolution possible. 
  • Incorporates IST and stage mapping systems. 
  • Anti-backlash mechanism with adjustable limit switches. 
  • Accepts linear encoders, further improving accuracy.
  • Versatile: 
  • Controlled via the ProScan® III Control System.
  • Travel range 154 x 154 mm. 
 
Fitting most upright microscopes, the H105F is part of the wide range of precisely engineered ProScan® stages. With a large travel range, it can accommodate large samples including semi-conductor wafers, photo masks, and printed circuit boards, making it ideal for material science applications. Interchangeable sample holders allow the stage to be used for a wide variety of applications. With high resolution and excellent repeatability the H105F is ideal for high end, material science applications. 
 
Uni-directional repeatability**        0.7 µm
Metric accuracy per mm***            0.15 µm
Squareness                                      170 arc seconds
Travel Range                                   154 x 154 mm
Minimum Step Size                         0.04 µm
Recommended Speed                   24 mms-1
Ball Screw                                         2 mm
Motor Type (SPR)                            200
Encoders                                           No