Prior

H116

Key features:

  • Suitable for most major brand microscopes.
  • 1µm or better repeatability
  • Quiet and reliable
  • Wide range of wafer holders.
  • 254mm x 215 mm (10"x8.5") travel

The H116 stage is suitable for most larger microscopes and can easily accommodate 8 inch (200mm) wafers and a variety of large specimens, making it perfect for performing scanning of a wide range of semiconductor wafers, photo masks, flat panel displays, and printed circuit boards.

  um um mm/s mm kg mm SPR ** um res
  Uni-Directional
Repeatability *

Min Step
Size (micron)

Recomended
speed
Max Travel
Range
Weight Ball Screw
Pitch
Motor
Type
Encoders
H116/2 ## +/- 0.7 0.04 40 255 X 215 7.7 2 200 No
HE16/2 ## +/- 0.7 0.04 40 255 X 215 7.7 2 200 0.1

Requires the use of a Prior ProScanTM II or above controller and are based on Prior method of testing.
*Using a Prior ProScanTM controllers with backlash correction enabled, all repeatability is Uni-directional.
**S.P.R: Full steps per revolution of motor.