Prior

H112

Key features:

  • Suitable for most major brand microscopes.
  • 1µm or better repeatability
  • Optional 100nm linear scales provide the highest resolution available.
  • Wide range of wafer holders
  • 300 mm x 300 mm (12"x12") travel

The H112 stage is ideal for scanning a wide range of semiconductor wafers, photo masks, flat panel displays and printed circuit boards. The H112 can easily accommodate 12 inch (300 mm) wafers and works with many robot arm wafer loaders. In addition, the H112 can be used for transmitted light applications with 250 mm x 250 mm transmitted light area.

Click here to see how a H112 stage was used in laser cutting. 

  um um mm/s mm kg mm SPR ** um res
  Uni-Directional
Repeatability *
Min Step
Size
Recomended
speed
Max Travel
Range
Weight Ball Screw
Pitch
Motor
Type
Encoders
H112/2 ## +/- 0.7 0.04 40 302 X 302 14.5 2mm 200 No
HE12/2 ## +/- 0.7 0.1 40 302 X 302 14.5 2mm 200 0.1

Requires the use of a Prior ProScanTM II or above controller and are based on Prior method of testing.
*Using a Prior ProScanTM controllers with backlash correction enabled, all repeatability is Uni-directional.
**S.P.R: Full steps per revolution of motor.